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| University: | DE | |
| Institute, faculty: | Faculty of Science | |
| Department(s): | Department of Solid State Physics | |
| Name of course : | Thin Film Deposition Techniques | |
| Name of responsible: | Dr Langer Gábor | |
| E-mail: | glanger@tigris.klte.hu | |
| Name of teachers: | Dr Langer Gábor | |
| Course programme: | Gases. Gases in vacuum system. Measurement of pressure. Vacuum materials and components. Vacuum system. Thermal evaporation. electron-beam evaporation. MBE. Sputtering. Magnetron sources. Sputtering characteristics. |
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| Grade: | Ph.D |
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| Type: | lecture |
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Labelled in education: |
kötelezően választható | |
Name of lecture notes or books (if any): |
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Number of credits: |
3 | |